SYSTEM AND METHODS FOR TARGET MATERIAL DELIVERY IN A LASER PRODUCED PLASMA EUV LIGHT SOURCE

• Main Authors: BRANDT, DAVID, C, ERSHOV, ALEXANDER, I, SIMMONS, RODNEY, D, KHODYKIN, OLEH, V, BOWERING, NORBERT, R, BYKANOV, ALEXANDER, N, FOMENKOV, IGOR, V, VASCHENKO, GEORGIY, O
• Format: Patent
• Language: English; French; German
• Published: 14.05.2014
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; X-RAY TECHNIQUE

Devices are disclosed herein which may comprise an EUV reflective optic having a surface of revolution that defines a rotation axis and a circular periphery. The optic may be positioned to incline the axis at a nonzero angle relative to a horizontal plane, and to establish a vertical projection of t...