SUBSTRATE LAMINATION SYSTEM AND METHOD

A substrate lamination apparatus (100), the apparatus comprising: a vacuum chamber (110), a flexible membrane (120), the flexible membrane partitioning the vacuum chamber into a first compartment (121) and a second compartment (122), a substrate support (130), and a substrate alignment insert (140)...

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Bibliographic Details
Main Authors NEMETH, PAUL, R, MARZEN, VINCENT, P, TCHON, JOSEPH, L, SAMPICA, JAMES, D, BARNIDGE, TRACY, J
Format Patent
LanguageEnglish
French
German
Published 25.09.2013
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FREQUENCY-CHANGING
LAYERED PRODUCTS
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PERFORMING OPERATIONS
PHYSICS
SEMICONDUCTOR DEVICES
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
TRANSPORTING
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Summary:A substrate lamination apparatus (100), the apparatus comprising: a vacuum chamber (110), a flexible membrane (120), the flexible membrane partitioning the vacuum chamber into a first compartment (121) and a second compartment (122), a substrate support (130), and a substrate alignment insert (140) comprising a base portion (141) and at least one substrate alignment guide (142).
Bibliography:Application Number: EP20090702309