METHOD FOR PRODUCING AN ELECTRONIC COMPONENT
A method for producing an electronic component and an electronic component, having barrier layers for the encapsulation of the component. The method involves providing a substrate (1) with at least one functional layer (22), and an electronic component, applying at least one first barrier layer (3)...
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Main Authors | , , , , , |
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Format | Patent |
Language | English French German |
Published |
04.03.2020
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Subjects | |
Online Access | Get full text |
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Summary: | A method for producing an electronic component and an electronic component, having barrier layers for the encapsulation of the component. The method involves providing a substrate (1) with at least one functional layer (22), and an electronic component, applying at least one first barrier layer (3) on the functional layer (22) by way of plasmaless atomic layer deposition (PLALD), and applying at least one second barrier layer (4) on the functional layer (22) by way of plasma-enhanced chemical v0apor deposition (PECVD). |
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Bibliography: | Application Number: EP20090705395 |