METHOD FOR LOCALISED HETERO-EPITAXY ON A DIELECTRIC, IN PARTICULAR OF GERMANIUM ON OXIDISED SILICON, AND METHOD FOR MAKING A PRODUCTION BASE OF A HOMOGENEOUS OR HETEROGENEOUS INTEGRATED CIRCUIT
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Main Authors | , , , , |
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Format | Patent |
Language | English French German |
Published |
16.11.2016
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Subjects | |
Online Access | Get full text |
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Bibliography: | Application Number: EP20080863510 |
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