APPARATUS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA

A cleaning material is applied to a surface of a substrate. The cleaning material includes one or more polymeric materials for entrapping contaminants present on the surface of the substrate. A rinsing fluid is applied to the surface of the substrate at a controlled velocity to effect removal of the...

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Bibliographic Details
Main Authors PENG, GRANT, ZHU, JI, MUI, DAVID, S., L, KON, SHIHUNG, MENDIRATTA, ARJUN, PODLESNIKAGAN, SRINIVASAN, SATISH
Format Patent
LanguageEnglish
French
German
Published 01.08.2012
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Summary:A cleaning material is applied to a surface of a substrate. The cleaning material includes one or more polymeric materials for entrapping contaminants present on the surface of the substrate. A rinsing fluid is applied to the surface of the substrate at a controlled velocity to effect removal of the cleaning material and contaminants entrapped within the cleaning material from the surface of the substrate. The controlled velocity of the rinsing fluid is set to cause the cleaning material to behave in an elastic manner when impacted by the rinsing fluid, thereby improving contaminant removal from the surface of the substrate.
Bibliography:Application Number: EP20080863385