Actuator using piezoelectric element and method of driving the same

An actuator using a piezoelectric element (10) and a method of driving the same. The actuator includes at least one piezoelectric cell (10a,10d) moving by displacement according to an input voltage, at least one piezoelectric sensor (10b,10c) sensing the displacement of the at least one piezoelectri...

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Bibliographic Details
Main Authors SO, HYOUNG-JONG, CHEONG, YOUNG-MIN, LEE, KYOUNG-WOO, KWON, JAE-HWAN, KIM, HONG-HEE
Format Patent
LanguageEnglish
French
German
Published 17.03.2010
Subjects
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:An actuator using a piezoelectric element (10) and a method of driving the same. The actuator includes at least one piezoelectric cell (10a,10d) moving by displacement according to an input voltage, at least one piezoelectric sensor (10b,10c) sensing the displacement of the at least one piezoelectric cell, an error detector (5) detecting an error in the at least one piezoelectric sensor, and a feedback signal generator (7) generating a feedback signal corresponding to the error, thereby performing micromirror driving and sensing.
Bibliography:Application Number: EP20090169929