PRESSURE CONTROL FOR VACUUM PROCESSING SYSTEM

A pressure control system includes a digital communication network between a pressure sensor and a pressure controller. The digital communication network is configured to communicate signals between the pressure sensor and the pressure controller. The pressure sensor is configured to measure pressur...

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Bibliographic Details
Main Authors CHAMBERLAIN, DAVID, GOLDMAN, DAVID, J, HILL, GORDON
Format Patent
LanguageEnglish
French
German
Published 30.12.2009
Subjects
CONTROLLING
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Summary:A pressure control system includes a digital communication network between a pressure sensor and a pressure controller. The digital communication network is configured to communicate signals between the pressure sensor and the pressure controller. The pressure sensor is configured to measure pressure within a vacuum chamber in a processing tool. The pressure controller is responsive to pressure measurements made by the pressure sensor and communicated to the pressure controller through the digital communication network, to control the pressure within the vacuum chamber so as to maintain the pressure in the vacuum chamber at a pressure set point received from the tool.
Bibliography:Application Number: EP20080731208