Polycrystalline silicon reactor

• Main Authors: SAKAGUCHI, MASAAKI, ISHII, TOSHIYUKI, ENDOH, TOSHIHIDE, TEBAKARI, MASAYUKI
• Format: Patent
• Language: English; French; German
• Published: 14.10.2009
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS

A polycrystalline silicon reactor 1 which can prevent polycrystalline silicon which deposits on the surface of an electrode 5 holding a silicon seed rod 4 from being peeled off is provided. In a polycrystalline silicon reactor 1 which applies an electric current to a silicon seed rod 4 provided with...