METHOD FOR DETERMINATION OF RESIDUAL ERRORS
There is provided a method for determining residual errors, compromising the following steps: in a first step, a test plate comprising a first pattern is used, and in a second step, a test plate comprising a second pattern which is reflected and/or rotated with respect to the first step is used.
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
20.06.2018
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Subjects | |
Online Access | Get full text |
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Summary: | There is provided a method for determining residual errors, compromising the following steps: in a first step, a test plate comprising a first pattern is used, and in a second step, a test plate comprising a second pattern which is reflected and/or rotated with respect to the first step is used. |
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Bibliography: | Application Number: EP20070846501 |