Current change limiting device

In a method of limiting the current (I out ) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the powe...

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Bibliographic Details
Main Authors OZIMEK, PAWEL, KLIMCZAK, ANDRZEJ, BUGYI, RAFAL
Format Patent
LanguageEnglish
French
German
Published 29.02.2012
Subjects
BASIC ELECTRIC ELEMENTS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
GENERATION
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Summary:In a method of limiting the current (I out ) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power supply (2) and the plasma chamber (3).
Bibliography:Application Number: EP20070025085