SEMICONDUCTOR SENSOR DEVICE AND METHOD FOR MANUFACTURING SAME

• Main Authors: KAZAMA, ATSUSHI, AONO, TAKANORI, OKADA, RYOJI, TAKADA, YOSHIAKI
• Format: Patent
• Language: English; French; German
• Published: 03.06.2009
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

Provided is a semiconductor sensor device which is manufactured by an MEMS technology wherein machining technology and/or material technology is combined with semiconductor technology for detecting and measuring various physical quantities. In the semiconductor sensor device, cracks which generate i...