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METHODS FOR FORMING A CELL ON THE MASTERING TOOLS
Mastering tools and systems and methods for forming a cell on the mastering tools are provided. An exemplary method includes emitting a first laser light pulse from a laser for a first predetermined time interval such that at least a portion of the first laser light pulse forms the cell on the maste...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
16.07.2014
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Subjects | |
Online Access | Get full text |
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Summary: | Mastering tools and systems and methods for forming a cell on the mastering tools are provided. An exemplary method includes emitting a first laser light pulse from a laser for a first predetermined time interval such that at least a portion of the first laser light pulse forms the cell on the mastering tool. The cell has an opening size within a range of 10-100 micrometers and an aspect ratio less than or equal to 1.25. |
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Bibliography: | Application Number: EP20070798571 |