Piezoelectric resonator structure and method for manufacturing a coupled resonator device
A method for manufacturing a coupled resonator device (110) comprises forming a first part of a plurality of layers, trimming an exposed layer of the first part and forming a remaining part of the plurality of layers. The coupled resonator device comprises a stack of the plurality of layers, the plu...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
25.02.2009
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Subjects | |
Online Access | Get full text |
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Summary: | A method for manufacturing a coupled resonator device (110) comprises forming a first part of a plurality of layers, trimming an exposed layer of the first part and forming a remaining part of the plurality of layers. The coupled resonator device comprises a stack of the plurality of layers, the plurality of layers comprising a first piezo-layer (124) with a first and a second electrode (122,126) layer sandwiching the first piezo-layer, a second piezo-layer (144) with a first and a second electrode layer (142,146) sandwiching the second piezo-layer, the first and second piezo-layers being acoustically coupled to each other. |
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Bibliography: | Application Number: EP20080010376 |