Piezoelectric resonator structure and method for manufacturing a coupled resonator device

A method for manufacturing a coupled resonator device (110) comprises forming a first part of a plurality of layers, trimming an exposed layer of the first part and forming a remaining part of the plurality of layers. The coupled resonator device comprises a stack of the plurality of layers, the plu...

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Bibliographic Details
Main Authors FATTINGER, GERNOT, NESSLER, WINFRIED, DIEFENBECK, KLAUS, MUELLER, PETER
Format Patent
LanguageEnglish
French
German
Published 25.02.2009
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:A method for manufacturing a coupled resonator device (110) comprises forming a first part of a plurality of layers, trimming an exposed layer of the first part and forming a remaining part of the plurality of layers. The coupled resonator device comprises a stack of the plurality of layers, the plurality of layers comprising a first piezo-layer (124) with a first and a second electrode (122,126) layer sandwiching the first piezo-layer, a second piezo-layer (144) with a first and a second electrode layer (142,146) sandwiching the second piezo-layer, the first and second piezo-layers being acoustically coupled to each other.
Bibliography:Application Number: EP20080010376