FIELD EFFECT TRANSISTOR
Disclosed is an HJFET 110 which comprises: a channel layer 12 composed of In y Ga 1-y N (0¤y¤1); a carrier supply layer 13 composed of Al x Ga 1-x N (0¤x¤1), the carrier supply layer 13 being provided over the channel layer 12 and including at least one p-type layer; and a source electrode 15S,...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English French German |
Published |
22.04.2009
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Subjects | |
Online Access | Get full text |
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Summary: | Disclosed is an HJFET 110 which comprises: a channel layer 12 composed of In y Ga 1-y N (0¤y¤1); a carrier supply layer 13 composed of Al x Ga 1-x N (0¤x¤1), the carrier supply layer 13 being provided over the channel layer 12 and including at least one p-type layer; and a source electrode 15S, a drain electrode 15D and a gate electrode 17 which are disposed facing the channel layer 12 through the p-type layer, and provided over the carrier supply layer 13. The following relational expression is satisfied: 5.6 × 10 11 ¢ x < N A × · × t ¢ cm - 2 < 5.6 × 10 13 ¢ x , where x denotes an Al compositional ratio of said carrier supply layer, t denotes a thickness of said p-type layer, N A denotes an impurity concentration, and · denotes an activation ratio. |
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Bibliography: | Application Number: EP20070736989 |