FIELD EFFECT TRANSISTOR

Disclosed is an HJFET 110 which comprises: a channel layer 12 composed of In y Ga 1-y N (0‰¤y‰¤1); a carrier supply layer 13 composed of Al x Ga 1-x N (0‰¤x‰¤1), the carrier supply layer 13 being provided over the channel layer 12 and including at least one p-type layer; and a source electrode 15S,...

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Main Authors ANDO, YUJI, KURODA, NAOTAKA, NAKAYAMA, TATSUO, INOUE, TAKASHI, MIYAMOTO, HIRONOBU, MURASE, YASUHIRO, OTA, KAZUKI, WAKEJIMA, AKIO, OKAMOTO, YASUHIRO
Format Patent
LanguageEnglish
French
German
Published 22.04.2009
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Summary:Disclosed is an HJFET 110 which comprises: a channel layer 12 composed of In y Ga 1-y N (0‰¤y‰¤1); a carrier supply layer 13 composed of Al x Ga 1-x N (0‰¤x‰¤1), the carrier supply layer 13 being provided over the channel layer 12 and including at least one p-type layer; and a source electrode 15S, a drain electrode 15D and a gate electrode 17 which are disposed facing the channel layer 12 through the p-type layer, and provided over the carrier supply layer 13. The following relational expression is satisfied: 5.6 × 10 11 ¢ x < N A × · × t ¢ cm - 2 < 5.6 × 10 13 ¢ x , where x denotes an Al compositional ratio of said carrier supply layer, t denotes a thickness of said p-type layer, N A denotes an impurity concentration, and · denotes an activation ratio.
Bibliography:Application Number: EP20070736989