Substrate support

The carrier (1) has a carrier layer (2) and a functional element (4) that is designed as a drive unit (5), which consists of piezoelectric material. The carrier layer is designed in a laminar manner and consists of two flat sides (3, 7). The flat side (7) has a retaining unit (8) for detachable hold...

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Bibliographic Details
Main Authors SCHOEFTNER, RAINER, DI, RITTENSCHOBER, THOMAS, DI, MAG, MUEHLBERGER, MICHAEL, MATTHIAS, DI, GUSENBAUER, MARKUS, DI
Format Patent
LanguageEnglish
French
German
Published 06.08.2008
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:The carrier (1) has a carrier layer (2) and a functional element (4) that is designed as a drive unit (5), which consists of piezoelectric material. The carrier layer is designed in a laminar manner and consists of two flat sides (3, 7). The flat side (7) has a retaining unit (8) for detachable holding of laminar objects such as a substrate (9). The drive unit is connected with the flat side (3) of the carrier layer. Sensors (6) are connected with the flat side (3) of the carrier layer. An independent claim is also included for an imprint lithography method for formation of the micro or nano structures on a substrate. Die Erfindung beschreibt einen Substratträger umfassend eine Trägerlage und zumindest ein funktionales Element, wobei dass das funktionale Element als Antriebsmittel ausgebildet ist.
Bibliography:Application Number: EP20070002058