Particle-optical arrangement with particle-optical component

A particle-optical arrangement comprises a charged particle source for generating at least one beam (311) of charged particles; a first multi-aperture plate (613) having a plurality of apertures and a second multi-aperture plate (614) having a plurality of apertures, wherein the second multi-apertur...

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Bibliographic Details
Main Authors GRESCHNER, JOHANN, KEMEN, THOMAS, KNIPPELMEYER, RAINER, FRITZ, GEORG, CASARES, ANTONIO, KALT, SAMUEL, BAYER, THOMAS
Format Patent
LanguageEnglish
French
German
Published 28.09.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A particle-optical arrangement comprises a charged particle source for generating at least one beam (311) of charged particles; a first multi-aperture plate (613) having a plurality of apertures and a second multi-aperture plate (614) having a plurality of apertures, wherein the second multi-aperture plate is spaced apart from the first multi-aperture plate such that a gap is formed therebetween; and a mounting structure (605) mounting the first multi-aperture plate relative to the second multi-aperture plate, wherein the mounting structure comprises at least one actuator (690) for adjusting a position of the first multi-aperture plate relative to the second multi-aperture plate.
Bibliography:Application Number: EP20060805659