Process for depositing a thin film and product obtained

• Main Authors: DURAN, MAXIME, GAY, THIERRY, VIASNOFF, EMILIE, GARRE, EMMANUEL, BESSON, SOPHIE, VICTOR, CORINNE, GENTILHOMME, CAROLE
• Format: Patent
• Language: English; French; German
• Published: 07.05.2008
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Protecting a substrate against oxidation, where the substrate has a surface comprising an organic material, comprises creating a nonthermal plasma next to the substrate and injecting a precursor of a chemical element into the plasma to form a thin coating on the surface. The process is operated at a...