Facility connection positioning template

One embodiment of an apparatus includes a flat, plate-shaped template (100, 200) adapted for facilities integration. The template defines a plurality of apertures (102, 202) arranged in a predetermined pattern of locations, each template aperture adapted to position a facility conduit passing throug...

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Bibliographic Details
Main Authors BUCKIUS, DUC DANG, FOSTER, JASON KIRK, GOMEZ, OSCAR, ROBINSON, JEFFREY BARRETT
Format Patent
LanguageEnglish
French
German
Published 30.04.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:One embodiment of an apparatus includes a flat, plate-shaped template (100, 200) adapted for facilities integration. The template defines a plurality of apertures (102, 202) arranged in a predetermined pattern of locations, each template aperture adapted to position a facility conduit passing through each template aperture in a predetermined location to facilitate subsequently coupling the positioned facility conduit to the wafer processing tool. Other embodiments are described and claimed.
Bibliography:Application Number: EP20070018001