THIN FILM PIEZOELECTRIC RESONATOR AND METHOD OF MANUFACTURING THE SAME

A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first electrode; and a second electrode placed on the piezoelectric film, the second electrode having a periphery partially overlapping on the cav...

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Main Authors ITAYA, KAZUHIKO, YASUMOTO, TAKAAKI, SANO, KENYA, YANASE, NAOKO, OHARA, RYOICHI
Format Patent
LanguageEnglish
French
German
Published 29.07.2015
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Abstract A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first electrode; and a second electrode placed on the piezoelectric film, the second electrode having a periphery partially overlapping on the cavity and tapered to have an inner angle of 30 degrees or smaller defined by a part of the periphery thereof and a bottom thereof.
AbstractList A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first electrode; and a second electrode placed on the piezoelectric film, the second electrode having a periphery partially overlapping on the cavity and tapered to have an inner angle of 30 degrees or smaller defined by a part of the periphery thereof and a bottom thereof.
Author ITAYA, KAZUHIKO
OHARA, RYOICHI
SANO, KENYA
YANASE, NAOKO
YASUMOTO, TAKAAKI
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DocumentTitleAlternate DÜNNSCHICHTIGER PIEZOELEKTRISCHER RESONATOR UND HERSTELLUNGSVERFAHREN DAFÜR
RÉSONATEUR PIÉZOÉLECTRIQUE À COUCHE MINCE ET SON PROCÉDÉ DE FABRICATION
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Snippet A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first...
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SubjectTerms BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
Title THIN FILM PIEZOELECTRIC RESONATOR AND METHOD OF MANUFACTURING THE SAME
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