THIN FILM PIEZOELECTRIC RESONATOR AND METHOD OF MANUFACTURING THE SAME

A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first electrode; and a second electrode placed on the piezoelectric film, the second electrode having a periphery partially overlapping on the cav...

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Bibliographic Details
Main Authors ITAYA, KAZUHIKO, YASUMOTO, TAKAAKI, SANO, KENYA, YANASE, NAOKO, OHARA, RYOICHI
Format Patent
LanguageEnglish
French
German
Published 29.07.2015
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first electrode; and a second electrode placed on the piezoelectric film, the second electrode having a periphery partially overlapping on the cavity and tapered to have an inner angle of 30 degrees or smaller defined by a part of the periphery thereof and a bottom thereof.
Bibliography:Application Number: EP20060731103