TUNING FORK GYROSCOPES WITH IMPROVED SCALE FACTOR

A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield el...

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Bibliographic Details
Main Authors BORENSTEIN, JEFFREY, T, KOUREPENIS, ANTHONY, S, ELLIOTT, RICHARD, KIRKOS, GREGORY, BERNSTEIN, JONATHAN, WEINBERG, MARC, S
Format Patent
LanguageEnglish
French
German
Published 26.03.2008
Subjects
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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Summary:A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.
Bibliography:Application Number: EP20060784891