Plasma processing system
Plasma treatment installation comprises workpiece supports (21), support bases (23) for supporting the workpieces, a hood (25) placed on the workpiece support to surround the supports and form a sealed treatment chamber and a manipulator (13) for automatically charging the support bases with workpie...
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| Main Author | |
|---|---|
| Format | Patent |
| Language | English French German |
| Published |
21.11.2007
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| Subjects | |
| Online Access | Get full text |
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| Abstract | Plasma treatment installation comprises workpiece supports (21), support bases (23) for supporting the workpieces, a hood (25) placed on the workpiece support to surround the supports and form a sealed treatment chamber and a manipulator (13) for automatically charging the support bases with workpieces.
Eine Plasmabehandlungsanlage weist einen Manipulator (13) auf, der mehrere Werkstückträger (21) mit Werkstücken versorgt und diese nach der Behandlung entnimmt. Jeder Werkstückträger (21) bildet zusammen mit einer abnehmbaren Haube (25) einen Behandlungsraum, in dem eine Plasmabehandlung erfolgt. Die Haube (25) wird abdichtend mit einem Sockel (20) verbunden. Während ein Werkstückträger (21) eines Paares bestückt wird, findet an dem anderen Werkstückträger eine Plasmabehandlung statt. |
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| AbstractList | Plasma treatment installation comprises workpiece supports (21), support bases (23) for supporting the workpieces, a hood (25) placed on the workpiece support to surround the supports and form a sealed treatment chamber and a manipulator (13) for automatically charging the support bases with workpieces.
Eine Plasmabehandlungsanlage weist einen Manipulator (13) auf, der mehrere Werkstückträger (21) mit Werkstücken versorgt und diese nach der Behandlung entnimmt. Jeder Werkstückträger (21) bildet zusammen mit einer abnehmbaren Haube (25) einen Behandlungsraum, in dem eine Plasmabehandlung erfolgt. Die Haube (25) wird abdichtend mit einem Sockel (20) verbunden. Während ein Werkstückträger (21) eines Paares bestückt wird, findet an dem anderen Werkstückträger eine Plasmabehandlung statt. |
| Author | STRAEMKE, SIEGFRIED |
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| DocumentTitleAlternate | Système de traitement par plasma Plasmabehandlungsanlage |
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| Notes | Application Number: EP20070108041 |
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| PublicationYear | 2007 |
| RelatedCompanies | STRAEMKE, SIEGFRIED, DR |
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| Snippet | Plasma treatment installation comprises workpiece supports (21), support bases (23) for supporting the workpieces, a hood (25) placed on the workpiece support... |
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| SubjectTerms | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| Title | Plasma processing system |
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