Charged particle beam device with ozone supply

The invention provides a charged particle beam device for irradiating a specimen (28), comprising a particle source (13; 14, 16) for providing a beam of charged particles (31), an optical device (18, 20, 22, 24, 26, 27) for directing the beam of charged particles onto the specimen and an ozone unit...

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Bibliographic Details
Main Authors FROSIEN, JUERGEN, ELGAR, YACOV
Format Patent
LanguageEnglish
French
German
Published 28.07.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:The invention provides a charged particle beam device for irradiating a specimen (28), comprising a particle source (13; 14, 16) for providing a beam of charged particles (31), an optical device (18, 20, 22, 24, 26, 27) for directing the beam of charged particles onto the specimen and an ozone unit for reducing the charging and/or contamination of the specimen. The ozone unit comprises a supply of ozone (34, 35, 36) and a specimen nozzle unit (38) for directing an ozone gas flow to the specimen (28). Further, the invention provides a charged particle beam device for irradiating a specimen comprising a particle source (13; 14, 16) for providing a beam of charged particles (31), an optical device (18, 20, 22, 24, 26, 27) for directing the beam of charged particles onto the specimen, a detector (30) and a gas unit for reducing the charging and/or contamination of the detector. The gas unit comprises a supply of gas (34, 35, 37) and a detector nozzle unit (40) for directing a gas flow to the detector. Further, the present invention provides methods for operating charged particle beam devices according to the present invention.
Bibliography:Application Number: EP20060003722