TRANSPARENT OBJECT HEIGHT MEASUREMENT

A method and system for determining a height of a substantially transparent object having a refractive index are presented. The method is based on Fast Moiré Interferometry and comprises obtaining at least one image of the object corresponding to an intensity pattern projected on the pellicle. Then...

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Bibliographic Details
Main Authors CANTIN, MICHEL, NIKITINE, ALEXANDRE
Format Patent
LanguageEnglish
French
German
Published 02.05.2007
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:A method and system for determining a height of a substantially transparent object having a refractive index are presented. The method is based on Fast Moiré Interferometry and comprises obtaining at least one image of the object corresponding to an intensity pattern projected on the pellicle. Then the method comprises establishing a phase associated to the object using the image and comprises determining the height using the object phase, the refractive index and a reference phase corresponding to a reference surface.
Bibliography:Application Number: EP20050770580