METHOD FOR MANUFACTURING A MICRO-ELECTROMECHANICAL DEVICE

Briefly, embodiments of the present invention provide an electro-mechanical device, for example, a Micro-Electro-Mechanical Systems (MEMS) device, for example, a low-loss Film Bulk Acoustic Resonators (FBAR) filter, and a process to produce the same.

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Bibliographic Details
Main Authors GINSBURG, EYAL, BAR-SADEH, EYAL, TALALAEVSKI, ALEXANDER
Format Patent
LanguageEnglish
French
German
Published 27.12.2006
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:Briefly, embodiments of the present invention provide an electro-mechanical device, for example, a Micro-Electro-Mechanical Systems (MEMS) device, for example, a low-loss Film Bulk Acoustic Resonators (FBAR) filter, and a process to produce the same.
Bibliography:Application Number: EP20050729559