METHOD FOR SEPARATING A MOBILE DEVICE LAYER AND COMPONENT OBTAINED BY SAID METHOD

Detachment of a useful layer (1), connected initially by a sacrificial layer (2) to a substrate (3), comprises the engraving, at least partially, of the sacrificial layer. Before engraving of the sacrificial layer at least part of the surface (4,5) of at least one of the layers (1, 3) in contact wit...

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Bibliographic Details
Main Authors DIEM, BERNARD, BOREL, MICHEL, GRANGE, HUBERT, VIOLLET, BOSSON, YYLVIE
Format Patent
LanguageEnglish
French
German
Published 11.04.2007
Subjects
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Summary:Detachment of a useful layer (1), connected initially by a sacrificial layer (2) to a substrate (3), comprises the engraving, at least partially, of the sacrificial layer. Before engraving of the sacrificial layer at least part of the surface (4,5) of at least one of the layers (1, 3) in contact with the sacrificial layer are doped and after engraving of the sacrificial layer these surfaces are superficially engraved to augment the rugosity of the doped part of the surface. An independent claim is also included for a component comprising a suspended useful layer, fastened to a substrate and obtained.
Bibliography:Application Number: EP20040767542