SPUTTER ION PUMP, PROCESS FOR MANUFACTURING THE SAME, AND IMAGE DISPLAY WITH SPUTTER ION PUMP

A sputter ion pump comprises a metal pump container (51). In the pump container are arranged a cathode (52) and an anode (53) opposed to each other in the pump container and a permanent magnet (57) situated between the cathode and the inner surface of the pump container. After locating the anode, ca...

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Bibliographic Details
Main Authors SHIMADA, YOSHIYUKI, SEINO, KAZUYUKI
Format Patent
LanguageEnglish
French
German
Published 15.02.2006
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A sputter ion pump comprises a metal pump container (51). In the pump container are arranged a cathode (52) and an anode (53) opposed to each other in the pump container and a permanent magnet (57) situated between the cathode and the inner surface of the pump container. After locating the anode, cathode, and magnetic material in the pump container, the magnetic material is magnetized from outside the pump container, thereby forming the permanent magnet.
Bibliography:Application Number: EP20040733679