Electroplating head and method for operating the same

An electroplating head including a chamber having a fluid entrance and a fluid exit is provided. The chamber is configured to contain a flow of electroplating solution from the fluid entrance to the fluid exit. The electroplating head also includes an anode disposed within the chamber. The anode is...

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Bibliographic Details
Main Authors REDEKER, FRED C, DORDI, YEZDI, BOYD, JOHN, MARASCHIN, BOB
Format Patent
LanguageEnglish
French
German
Published 08.06.2011
Subjects
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Summary:An electroplating head including a chamber having a fluid entrance and a fluid exit is provided. The chamber is configured to contain a flow of electroplating solution from the fluid entrance to the fluid exit. The electroplating head also includes an anode disposed within the chamber. The anode is configured to be electrically connected to a power supply. The electroplating head further includes a porous resistive material disposed at the fluid exit such that the flow of electroplating solution is required to traverse through the porous resistive material.
Bibliography:Application Number: EP20050253928