AMORPHOUS CARBON FILM FORMING METHOD AND DEVICE

• Main Authors: SAKAI, NAOYUKI, MORI, HIROYUKI, TACHIKAWA, HIDEO, ITOU, KYOUJI, ANDO, JUNJI, NAKANISHI, KAZUYUKI, SAITO, TOSHIYUKI, FUJIOKA, MIKIO, FUNAKI, YOSHIYUKI
• Format: Patent
• Language: English; French; German
• Published: 19.12.2012
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; BRAKES; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLUTCHES; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COUPLINGS FOR TRANSMITTING ROTATION; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; THERMAL INSULATION IN GENERAL; WEAPONS

An amorphous carbon film forming apparatus according to the present invention is provided with a film forming furnace; plural workpiece fixtures (23) for supporting plural plate-like workpieces (22) that take a disk shape or a ring shape in a state that the same are piled up vertically in parallel, the plural workpiece fixtures (23) being arranged within the film forming furnace at a regular angular interval on a circle and being connected to a negative electrode; nozzles (31, 32) provided for supplying a processing gas and including at least one nozzle (31) arranged at a center of the circle on which the plural workpiece fixtures (23) are arranged and plural nozzles (32) arranged at a regular angular interval on another circle which surrounds the workpieces fixtures (23) radially outside thereof; and a plasma power supply connected to at least the workpiece fixtures (23). The workpiece fixtures (23) are of a type that fixes two adjoining plate-like workpieces (22) in touch at their inner and/or outer portions with a cylindrical fixture (232).