CAPACITIVE SENSOR

Capacitance element electrodes (E1 to E5) and a grounded reference electrode (E0) are formed on a substrate (20). A displacement electrode (40) that is Z-axially displaced in accordance with a Z-axial movement of a detective member (30) externally operated, is disposed so as to be opposed to the abo...

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Bibliographic Details
Main Authors AGAYA, TOMOHIRO, MORIMOTO, HIDEO
Format Patent
LanguageEnglish
French
German
Published 26.10.2005
Edition7
Subjects
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:Capacitance element electrodes (E1 to E5) and a grounded reference electrode (E0) are formed on a substrate (20). A displacement electrode (40) that is Z-axially displaced in accordance with a Z-axial movement of a detective member (30) externally operated, is disposed so as to be opposed to the above electrodes (E0 to E5). The displacement electrode (40) cooperates with the reference electrode (E0) and the capacitance element electrodes (E1 to E5) to form capacitance elements (C0 to C5), respectively. Each of the capacitance elements (C1 to C5) is connected to the capacitance element (C0) in series in relation to an externally input signal. Changes in the capacitance values of the capacitance elements (C1 to C5) when the detective member (30) is moved, is detected by a signal processing circuit having hysteretic characteristics. Thereby, the displacement of the detective member (30) is detected.
Bibliography:Application Number: EP20030701013