Immersion lithography fluids

Suitable additives that may be added into immersion fluids, immersion fluids comprising at least one carrier medium selected from an aqueous fluid, a non-aqueous fluid, and mixtures thereof, and immersions fluids comprising at least one carrier medium and at least one additive useful for performing...

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Bibliographic Details
Main Authors PARRIS, GENE EVERAD, ZHANG, PENG, BUDHLALL, BRIDGETTE MARIA, BARBER, LESLIE COX
Format Patent
LanguageEnglish
French
German
Published 06.06.2007
Subjects
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Summary:Suitable additives that may be added into immersion fluids, immersion fluids comprising at least one carrier medium selected from an aqueous fluid, a non-aqueous fluid, and mixtures thereof, and immersions fluids comprising at least one carrier medium and at least one additive useful for performing immersion lithography at an operating wavelength ranging from 140 nm to 365 nm are disclosed herein.
Bibliography:Application Number: EP20050000989