CAPACITIVE PRESSURE SENSOR

Capacitive pressure sensor has a pressure measurement cell with a cylindrical base body with a first diameter and a first thickness, a measurement membrane of the front surface of the base body with a second diameter and thickness, an elastic sealing ring with third diameter and thickness and a supp...

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Bibliographic Details
Main Authors DREWES, ULFERT, GETMAN, IGOR, HEGNER, FRANK
Format Patent
LanguageEnglish
French
German
Published 10.06.2009
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:Capacitive pressure sensor has a pressure measurement cell with a cylindrical base body with a first diameter and a first thickness, a measurement membrane of the front surface of the base body with a second diameter and thickness, an elastic sealing ring with third diameter and thickness and a support ring with fourth diameter and thickness. The pressure measurement cell is clamped between the sealing ring and the support ring using a clamping ring. The dimensions of the components are such that axial tensioning and radial deformation of the measurement cell are minimized. An Independent claim is made for a method for iterative optimization of the dimensions of a support ring and a decoupling element for the pressure sensor based on use of finite element techniques.
Bibliography:Application Number: EP20030747993