Unsaturated oxygenated fluorocarbons for selective anisotropic etch applications
A mixture and a method comprising same for etching a dielectric material from a layered substrate are disclosed herein. Specifically, in one embodiment, there is provided a mixture for etching a dielectric material in a layered substrate comprising an unsaturated oxygenated fluorocarbon. The mixture...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English French German |
Published |
04.05.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | A mixture and a method comprising same for etching a dielectric material from a layered substrate are disclosed herein. Specifically, in one embodiment, there is provided a mixture for etching a dielectric material in a layered substrate comprising an unsaturated oxygenated fluorocarbon. The mixture of the present invention may be contacted with a layered substrate comprising a dielectric material under conditions sufficient to at least partially react with and remove at least a portion of the dielectric material. In another embodiment of the present invention, there is provided a method for making an unsaturated oxygenated fluorocarbon. |
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Bibliography: | Application Number: EP20040016213 |