High speed x-ray inspection apparatus and method

An apparatusÄ10Ü and method for inspecting partsÄ20Ü. The apparatusÄ10Ü includes an x-ray sourceÄ11-13Ü for illuminating a partÄ20Ü from a plurality of locations with respect to the partÄ20Ü and an imaging detectorÄ14Ü for forming a plurality of measured x-ray images of the partÄ20Ü, one such measur...

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Bibliographic Details
Main Authors SHIH, ANG, ROSNER, JEFFREY S
Format Patent
LanguageEnglish
French
German
Published 26.05.2004
Edition7
Subjects
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:An apparatusÄ10Ü and method for inspecting partsÄ20Ü. The apparatusÄ10Ü includes an x-ray sourceÄ11-13Ü for illuminating a partÄ20Ü from a plurality of locations with respect to the partÄ20Ü and an imaging detectorÄ14Ü for forming a plurality of measured x-ray images of the partÄ20Ü, one such measured x-ray image corresponding to each of the illumination locations. A controllerÄ50Ü compares each of the measured x-ray images with a corresponding calibration image. The controllerÄ50Ü provides a defective partÄ20Ü indication if one of the measured x-ray images differs from the corresponding calibration image by more than a threshold value in partÄ20Ü of the measured x-ray image. The controllerÄ50Ü localizes defects on the partÄ20Ü by comparing two or more of the measured x-ray images with two or more corresponding calibration images. The calibration images can be constructed from measured images of defect free partsÄ20Ü.
Bibliography:Application Number: EP20030016316