Method for making an electric circuit including a polishing step

Fabrication of integrated circuit comprises formation and withdrawal of conducting inserts. Some components (10, 20) of electric circuit are incorporated in some insulating materials (2, 4) superposed above substrate (1). Exclusion volume is arranged around certain components (10) sensitive to elect...

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Bibliographic Details
Main Authors INARD, ALAIN, ROUSSEL, CELINE, KORDIC, SRDJAN, GAYET, PHILIPPE
Format Patent
LanguageEnglish
French
German
Published 27.01.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Fabrication of integrated circuit comprises formation and withdrawal of conducting inserts. Some components (10, 20) of electric circuit are incorporated in some insulating materials (2, 4) superposed above substrate (1). Exclusion volume is arranged around certain components (10) sensitive to electrostatic coupling whilst conferring flat surface (S2) to each material (2, 4) at end of polishing.
Bibliography:Application Number: EP20030292029