BIOSENSOR MATRIX AND METHOD FOR MAKING SAME

The invention relates to a biosensor matrix comprising a substrate made of semiconductor material. It has a main plane surface and cavities formed in a surface opposite from said plane surface to define between the bottoms of said cavities and the main plane surface deformable structure each includi...

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Bibliographic Details
Main Authors BERGAUD, CHRISTIAN, COCHETEAU, EMELINE, BELIER, BENOIT, MARTINEZ, AUGUSTIN, NICU, LIVIU
Format Patent
LanguageEnglish
French
German
Published 22.06.2011
Subjects
CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
CHEMISTRY
COMBINATORIAL CHEMISTRY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
LIBRARIES, e.g. CHEMICAL LIBRARIES, IN SILICOLIBRARIES
MEASURING
METALLURGY
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
PHYSICS
TESTING
TRANSPORTING
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Summary:The invention relates to a biosensor matrix comprising a substrate made of semiconductor material. It has a main plane surface and cavities formed in a surface opposite from said plane surface to define between the bottoms of said cavities and the main plane surface deformable structure each including at least one piezoresistive or piezoelectric sensing element. The method of manufacture implements fabrication techniques specific to micro- and nanotechnologies, preferably with localized pre-amorphization of the surface of the substrate prior to implantation of piezoelectric elements, which implantation is followed by annealing.
Bibliography:Application Number: EP20020730368