Device manufacturing method, device manufactured thereby and computer program

To print layers of extended devices, that is devices extending over more than one target portion or die, a projection field is selected to minimize stitching errors. Preferably, the selection of the projection field is based on data characterizing the projection lens to be used and the projection fi...

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Bibliographic Details
Main Authors VAN DEN BRINK, ENNO, SIMON, KLAUS, VAN DE MOOSDIJK, MICHAEL JOSEPHUS EVERT
Format Patent
LanguageEnglish
French
German
Published 15.10.2003
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:To print layers of extended devices, that is devices extending over more than one target portion or die, a projection field is selected to minimize stitching errors. Preferably, the selection of the projection field is based on data characterizing the projection lens to be used and the projection field is selected so as minimize the difference between positional errors in the projected image on opposite sides of the field.
Bibliography:Application Number: EP20030252285