FABRICATION OF SEMICONDUCTOR DEVICES WITH AIR GAPS FOR ULTRA LOW CAPACITANCE INTERCONNECTION STRUCTURES

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Bibliographic Details
Main Authors KOHL, PAUL, ALBERT, BHUSARI, DHANANJAY, M, KELLEHER, HOLLIE ANN, HENDERSON, CLIFFORD, LEE, ALLEN, SUE, ANN, BIDSTRUP
Format Patent
LanguageEnglish
French
German
Published 25.11.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Bibliography:Application Number: EP20010968364