Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride
A process for reducing or eliminating NH3/HF/MFz liquid waste melt in the manufacture of NF3 is provided which includes the steps of providing an NF3 reactor for a reaction of F2 with a liquid NH3/HF/MFz mixture that produces NF3, HF, N2 and other nitrogen fluorides as gaseous products and a liquid...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
07.04.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | A process for reducing or eliminating NH3/HF/MFz liquid waste melt in the manufacture of NF3 is provided which includes the steps of providing an NF3 reactor for a reaction of F2 with a liquid NH3/HF/MFz mixture that produces NF3, HF, N2 and other nitrogen fluorides as gaseous products and a liquid NH3/HF/MFz mixture as the liquid waste melt. The process further provides for reduction or elimination of the liquid NH3/HF/MFz waste melt produced by the reactor. |
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Bibliography: | Application Number: EP20030006215 |