BOLOMETER MATERIAL, BOLOMETER THIN FILM, METHOD FOR MANUFACTURING BOLOMETER THIN FILM AND INFRARED DETECTING ELEMENT USING THE SAME

• Main Authors: MIYASHITA, S, HIGUMA, HIROKO
• Format: Patent
• Language: English; French; German
• Published: 20.08.2003
• Edition: 7
• Subjects: COLORIMETRY; ELECTRICITY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; PHYSICS; RADIATION PYROMETRY; TESTING

A bolometer thin film having a high temperature coefficient of resistance (TCR) is produced by simple and easy production process steps to thereby provide a highly sensitive infrared sensing element. The invention provides a bolometer using a thin film of an oxide represented by ZyCuOx, wherein Z is one or more of alkaline earth metals, one or more of rare earth elements selected from yttrium and lanthanoid elements, one or more of elements belonging to Period 5 or Period 6 of the Periodic Table selected from bismuth, lead, thallium, mercury and cadmium, or potassium or sodium; y is a number satisfying the following condition: 0 ≤ y ≤ 2; and x is a number satisfying the following condition: 0.5y < x ≤ 1.5 + 2y. The bolometer has a temperature coefficient of resistance (TCR) higher than that of conventional equivalents. This is produced by forming a bolometer thin film by means of sputtering using a mixture of an oxide of Cu such as Cu2O, CuO or a mixture of Cu2O and CuO with an oxide of any of the aforementioned elements represented by Z, or a complex oxide of these elements as a target.