BOLOMETER MATERIAL, BOLOMETER THIN FILM, METHOD FOR MANUFACTURING BOLOMETER THIN FILM AND INFRARED DETECTING ELEMENT USING THE SAME

A bolometer thin film having a high temperature coefficient of resistance (TCR) is produced by simple and easy production process steps to thereby provide a highly sensitive infrared sensing element. The invention provides a bolometer using a thin film of an oxide represented by ZyCuOx, wherein Z is...

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Bibliographic Details
Main Authors MIYASHITA, S, HIGUMA, HIROKO
Format Patent
LanguageEnglish
French
German
Published 20.08.2003
Edition7
Subjects
COLORIMETRY
ELECTRICITY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Summary:A bolometer thin film having a high temperature coefficient of resistance (TCR) is produced by simple and easy production process steps to thereby provide a highly sensitive infrared sensing element. The invention provides a bolometer using a thin film of an oxide represented by ZyCuOx, wherein Z is one or more of alkaline earth metals, one or more of rare earth elements selected from yttrium and lanthanoid elements, one or more of elements belonging to Period 5 or Period 6 of the Periodic Table selected from bismuth, lead, thallium, mercury and cadmium, or potassium or sodium; y is a number satisfying the following condition: 0 ≤ y ≤ 2; and x is a number satisfying the following condition: 0.5y < x ≤ 1.5 + 2y. The bolometer has a temperature coefficient of resistance (TCR) higher than that of conventional equivalents. This is produced by forming a bolometer thin film by means of sputtering using a mixture of an oxide of Cu such as Cu2O, CuO or a mixture of Cu2O and CuO with an oxide of any of the aforementioned elements represented by Z, or a complex oxide of these elements as a target.
Bibliography:Application Number: EP20010955700