Microelectrical mechanical system with improved beam suspension
In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled s...
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| Main Authors | , , , , , , |
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| Format | Patent |
| Language | English French German |
| Published |
02.05.2003
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| Edition | 7 |
| Subjects | |
| Online Access | Get full text |
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| Abstract | In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion. |
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| AbstractList | In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion. |
| Author | ANNIS, JEFFREY R MORRIS, WINFRED L HERBERT, PATRICK C HARRIS, RICHARD D KRETSCHMANN, ROBERT J LARSSON, HENRIC YAO, JUN J |
| Author_xml | – fullname: HARRIS, RICHARD D – fullname: LARSSON, HENRIC – fullname: MORRIS, WINFRED L – fullname: YAO, JUN J – fullname: KRETSCHMANN, ROBERT J – fullname: HERBERT, PATRICK C – fullname: ANNIS, JEFFREY R |
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| DocumentTitleAlternate | Mikroelektromechanische Vorrichtung mit einer verbesserten Balkenaufhängung Systeme microélectromécanique avec une suspension de poutre ameliorée |
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| Notes | Application Number: EP20020023905 |
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| RelatedCompanies | ROCKWELL AUTOMATION TECHNOLOGIES, INC |
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| Snippet | In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local... |
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| SubjectTerms | BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS RESONATORS TESTING TRANSPORTING |
| Title | Microelectrical mechanical system with improved beam suspension |
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