Microelectrical mechanical system with improved beam suspension

In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled s...

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Bibliographic Details
Main Authors HARRIS, RICHARD D, LARSSON, HENRIC, MORRIS, WINFRED L, YAO, JUN J, KRETSCHMANN, ROBERT J, HERBERT, PATRICK C, ANNIS, JEFFREY R
Format Patent
LanguageEnglish
French
German
Published 02.05.2003
Edition7
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
RESONATORS
TESTING
TRANSPORTING
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Summary:In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.
Bibliography:Application Number: EP20020023905