Chip microphone and method of making same

A chip microphone implemented as a single silicon-based chip includes a diaphragm which includes a vibration portion that vibrates in response to sound pressures, a support block which is formed on the diaphragm, excluding at least the vibration portion to provide a vibration space, and a back plate...

Full description

Saved in:
Bibliographic Details
Main Authors SAITO, NOBUO, NISHIGUCHI, TOSHIYUKI, MORITA, AKIRA, TAJIMA, TOSHIFUMI
Format Patent
LanguageEnglish
French
German
Published 29.10.2008
Subjects
DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
PUBLIC ADDRESS SYSTEMS
Online AccessGet full text

Cover

More Information
Summary:A chip microphone implemented as a single silicon-based chip includes a diaphragm which includes a vibration portion that vibrates in response to sound pressures, a support block which is formed on the diaphragm, excluding at least the vibration portion to provide a vibration space, and a back plate which is formed on the support block and over the vibration space, thereby facing the vibration portion of the diaphragm across the vibration space.
Bibliography:Application Number: EP20020256161