IMPROVEMENT OF SPECTRAL AND/OR SPATIAL RESOLUTION IN A LASER SCANNING MICROSCOPE

The method involves detecting a signal scattered, reflected, fluoresced or transmitted by the specimen with a position resolving detector. An image of the radiation from the specimen is formed on the detector and the position of the position-resolved measured radiation relative to the detector is sh...

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Bibliographic Details
Main Authors GERSTNER, VOLKER, MOEHLER, GUNTER, WOLLESCHENSKY, RALF
Format Patent
LanguageEnglish
French
German
Published 30.09.2009
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
COLORIMETRY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
RADIATION PYROMETRY
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Summary:The method involves detecting a signal scattered, reflected, fluoresced or transmitted by the specimen with a position resolving detector. An image of the radiation from the specimen is formed on the detector and the position of the position-resolved measured radiation relative to the detector is shifted. Intermediate values are computed from the signals for different displacements to increase spatial resolution. An independent claim is included for an arrangement for optical detection of characteristic parameters of an illuminated specimen.
Bibliography:Application Number: EP20010958054