Catadioptric reduction lens

The device generates a real intermediate image (3) and has a first catadioptric objective part (5) with a concave mirror and a beam deflector between the object and image planes (2,4) and a dioptric second objective part (8) after the deflector. The second part, which starts after the last mirror su...

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Bibliographic Details
Main Authors BEIERL, HELMUT, EPPLE, ALEXANDER
Format Patent
LanguageEnglish
French
German
Published 02.01.2004
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:The device generates a real intermediate image (3) and has a first catadioptric objective part (5) with a concave mirror and a beam deflector between the object and image planes (2,4) and a dioptric second objective part (8) after the deflector. The second part, which starts after the last mirror surface of the first part, has at least one lens (17) between the last mirror surface (9,10) and the intermediate image. AN Independent claim is also included for the following: a method of manufacturing semiconducting components and other finely structured parts.
Bibliography:Application Number: EP20020010551