Magnetic bearing type vacuum pump

To provide a magnetic bearing type vacuum pump, which can suppress the generation of eddy current on a shaft to be small in heat generation on the shaft and to be excellent in efficiency. In a shaft, an electromagnet target composing a target for electromagnets composing a radial magnetic bearing po...

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Bibliographic Details
Main Authors TAKAMINE, MASAYOSHI, MAEJIMA, YASUSHI
Format Patent
LanguageEnglish
French
German
Published 21.08.2002
Edition7
Subjects
BEARINGS
BLASTING
ELEMENTS OR CRANKSHAFT MECHANISMS
ENGINEERING ELEMENTS AND UNITS
FLEXIBLE SHAFTS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
ROTARY BODIES OTHER THAN GEARING ELEMENTS
SHAFTS
THERMAL INSULATION IN GENERAL
WEAPONS
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Summary:To provide a magnetic bearing type vacuum pump, which can suppress the generation of eddy current on a shaft to be small in heat generation on the shaft and to be excellent in efficiency. In a shaft, an electromagnet target composing a target for electromagnets composing a radial magnetic bearing portion, a radial sensor target composing a target for a coil detecting a displacement of the shaft in the vicinity of the magnetic bearing portion and a collar between the electromagnet target and the radial sensor target are composed of laminated steel plates, so that the generation of eddy current caused on the shaft due to magnetic field generated in the magnetic bearing portion is reduced.
Bibliography:Application Number: EP20020250895