Thermal actuator

A thermal actuator is taught for a micro-electromechanical device. The thermal actuator includes a base element, a cantilevered element (14) extending from the base element and normally residing in a first position. The cantilevered element includes a first layer (34) constructed of a dielectric mat...

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Bibliographic Details
Main Authors LEBENS, JOHN A, JARROLD, GREGORY S
Format Patent
LanguageEnglish
French
German
Published 05.06.2002
Edition7
Subjects
CORRECTION OF TYPOGRAPHICAL ERRORS
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
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Summary:A thermal actuator is taught for a micro-electromechanical device. The thermal actuator includes a base element, a cantilevered element (14) extending from the base element and normally residing in a first position. The cantilevered element includes a first layer (34) constructed of a dielectric material having a low thermal coefficient of expansion and a second layer (36) attached to the first layer, the second layer comprising intermetallic titanium aluminide. A pair of electrodes (30,32) are connected to the second layer to allow an electrical current to be passed through the second layer to thereby cause the temperature of the second layer to rise, the cantilevered element deflecting to a second position as a result of the temperature rise of the second layer and returning to the first position when the electrical current through the second layer is ceased and the temperature thereof decreases. The thermal actuator has particular application in an inkjet device wherein a series of such inkjet devices form an inkjet printhead.
Bibliography:Application Number: EP20010204421