METHOD AND APPARATUS FOR COOLING BACKSIDE OPTICALLY PROBED INTEGRATED CIRCUITS

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Bibliographic Details
Main Author DAVIDSON, HOWARD, L
Format Patent
LanguageEnglish
French
German
Published 19.07.2006
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Bibliography:Application Number: EP19990966246